Thông tin sản phẩm
Gas sampling method: Automatic suction type
Disilane: FS/25p
Target gas: Depends on specifications
Measurement range: According to specifications
Width(mm):62
Depth (mm): 128
Height (mm): 150
Ammonia: FS/100ppm
Silane: FS/25ppm
Dichlorosilane: FS/25ppm
Arsine: FS/250ppb
Phosphine: FS/1.0ppm
Diborane: FS/500ppb
Hydrogen selenide: FS/250ppb
Germane: FS/1.0 ppm
Chlorine: FS/5ppm
Chlorine trifluoride: FS/1.0ppm
Hydrogen chloride: FS/25ppm
Hydrogen fluoride: FS/10ppm
Hydrogen bromide: FS/10ppm
Nitric oxide: FS/100ppm
Hydrogen sulfide: FS/50ppm
Carbon monoxide: FS/250ppm
COSMOS XPS72
